JPH0366142U - - Google Patents

Info

Publication number
JPH0366142U
JPH0366142U JP12662489U JP12662489U JPH0366142U JP H0366142 U JPH0366142 U JP H0366142U JP 12662489 U JP12662489 U JP 12662489U JP 12662489 U JP12662489 U JP 12662489U JP H0366142 U JPH0366142 U JP H0366142U
Authority
JP
Japan
Prior art keywords
ion source
cusp
type
inner cylinder
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12662489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12662489U priority Critical patent/JPH0366142U/ja
Publication of JPH0366142U publication Critical patent/JPH0366142U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12662489U 1989-10-31 1989-10-31 Pending JPH0366142U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12662489U JPH0366142U (en]) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12662489U JPH0366142U (en]) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0366142U true JPH0366142U (en]) 1991-06-27

Family

ID=31674429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12662489U Pending JPH0366142U (en]) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0366142U (en])

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